| 摘要 |
PROBLEM TO BE SOLVED: To realize a shape measuring method and a shape measuring instrument capable of measuring precisely a shape, even when a setting error or the like exists in a measured object. SOLUTION: A temporary measuring probe scanning route 6 off-set by a radial length of a probe tip ball 2 along a normal line direction on an aimed measuring route 5 is found at first based on a design shape z=f(x, y) of a measured face 4, and a probe 1 is scanned to conduct temporary measurement. The setting error is separated from a shape error from a temporary measurement data by computation, a regular measuring probe scanning route is computed based on new coordinates and a new design shape, to conduct regular measurement. The shape is measured precisely because a contact point of the measured face 4 with the probe tip ball 2 is precluded from being shifted out of the aimed measuring route, in the regular measurement. COPYRIGHT: (C)2006,JPO&NCIPI
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