ELECTROSTATIC CAPACITY TYPE ULTRASONIC VIBRATOR, MANUFACTURING METHOD THEREOF, AND ELECTROSTATIC CAPACITY TYPE ULTRASONIC PROBE

摘要

An electrostatic capacity type ultrasonic vibrator includes a membrane (9) having one electrode (7) formed on the surface of the ultrasonic transmission/reception side, a cavity (13) configured on its rear surface, and a substrate (2) on which the membrane (9) and the cavity (13) are supported and the other electrode (12) is arranged. The electrostatic capacity type ultrasonic vibrator is characterized in that the membrane (9) includes a plurality of layers, at least one of which is a high dielectric film (8). Accordingly, it is possible to obtain a high sound pressure in a high frequency region.