| 摘要 |
PROBLEM TO BE SOLVED: To provide the inspection system of an electronic device for inspecting the presence of a connection failure of a circuit pattern such as a semiconductor package, by measuring the return loss of the circuit pattern by an incidence signal from a resonator. SOLUTION: The inspection system of an electronic device comprises a circuit for providing an electrical variable to the first end of the electronic device, a component connected to the second end of the electronic device for changing the given value of the electrical variable, and an inspection section electrically connected to the circuit, to measure the given changed value of the electrical variable, to compare the measured changed value of the electrical variable with a reference value, and then to determine the status of the electronic device. COPYRIGHT: (C)2006,JPO&NCIPI
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