| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum deposition apparatus which can accurately align a mask having a high-definition pattern with a substrate, and accordingly can produce a high-definition organic EL panel. SOLUTION: The vacuum deposition apparatus for vapor-depositing a vapor deposition material onto a substrate 4 through heating the material in a vacuum chamber with the use of a vapor deposition source has: a mask 6 which is provided on the substrate 4 and makes the material vapor-deposited into a predetermined pattern on the substrate 4; a mask holder 5 for holding the mask 6; a substrate holder 3 for holding the substrate 4; and a holding means 7 for holding the mask holder 5 by abutting the mask holder to a predetermined position of the substrate holder 3; wherein an abutted surface of any one of the substrate holder 3 and the mask holder 5 is provided with a protruding part 2. COPYRIGHT: (C)2006,JPO&NCIPI
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