| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit coating type coater permitting formation of a coating film of a uniform film thickness without adverse effects on surroundings. SOLUTION: The coater has a holding table 20 holding a substrate 1 on the vertically lower plane and a coating head 30 arranged so as to oppose the surface of the substrate 1 held on the table 20 and having a slit-shaped nozzle opening 31 allowing a specified coating solution 2 to flow toward the surface of the substrate 1. The coater applies the solution 2 onto the surface of the substrate 1 by moving the table 20 and the head 30 relatively in the horizontal direction. A liquid-retaining member 50 which retains a liquid 3 containing at least the same solvent as the principal solvent of the solution 2 in the recessed part 51 opening on the side of the substrate 1 is arranged so as to lie in the vicinity of the head 30 and oppose the substrate 1 applied with the solution 2. COPYRIGHT: (C)2006,JPO&NCIPI
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