| 发明名称 |
Methods and apparatus for data analysis |
| 摘要 |
A method and apparatus for data analysis according to various aspects of the present invention is configured to automatically identify a characteristic of a component fabrication process guided by characteristics of the test data for the components.
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| 申请公布号 |
US2005278597(A1) |
申请公布日期 |
2005.12.15 |
| 申请号 |
US20050053598 |
申请日期 |
2005.02.07 |
| 申请人 |
MIGUELANEZ EMILIO;SCOTT MICHAEL J;GORIN JACKY;BUXTON PAUL;TABOR PAUL |
发明人 |
MIGUELANEZ EMILIO;SCOTT MICHAEL J.;GORIN JACKY;BUXTON PAUL;TABOR PAUL |
| 分类号 |
G01R31/28;G05B23/02;G06F11/00;G06F11/273;G06F19/00;G11C29/56;H01L21/66;(IPC1-7):G01R31/28 |
主分类号 |
G01R31/28 |
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