发明名称 BURIED GUARD RING AND RADIATION HARDENED ISOLATION STRUCTURES AND FABRICATION METHODS
摘要 Semiconductor devices can be fabricated using conventional designs and process but including specialized structures to reduce or eliminate detrimental effects caused by various forms of radiation. Such semiconductor devices can include the one or more parasitic isolation devices and/or buried guard ring structures disclosed in the present application. The introduction of design and/or process steps to accommodate these novel structures is compatible with conventional CMOS fabrication processes, and can therefore be accomplished at relatively low cost and with relative simplicity.
申请公布号 WO2005079400(A3) 申请公布日期 2005.12.15
申请号 WO2005US04740 申请日期 2005.02.15
申请人 SILICON SPACE TECHNOLOGY CORPORATION 发明人 MORRIS, WESLEY, H.
分类号 H01L21/336;H01L21/74;H01L21/761;H01L23/06;H01L27/092;H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/336
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