VACUUM SPUTTERING CATHODE

摘要

The invention relates to a vacuum sputtering cathode comprising a target support (2) consisting of a cooler. The inventive cathode is characterised in that it comprises a support base (3) on which a frame (11) is disposed, said frame defining at least one cavity (1a) for the circulation of a coolant. According to the invention, a membrane (4) is disposed on top of the frame (11), said base (3), frame (11) and membrane (4) being assembled at the periphery thereof.