发明名称 WORKING METHOD OF ELECTRODE FORMED ON PLATE-TYPE MATTER
摘要 <P>PROBLEM TO BE SOLVED: To provide a working method capable of surely removing burs generated by cutting and cut waste adhered on a cutting surface, in the working method for cutting a plurality of electrodes projected on the surface of a plate and levelling its height. <P>SOLUTION: The working method for making uniform the heights of a plurality of projected electrodes on the surface of the plate, by cutting them employing a working device equipped with a chuck table with a retaining surface for retaining the plate type matter and a cutting unit with a cutting tool for cutting the plate type matter retained by a chuck table comprises a cutting process and a levelling process. In the cutting process, the electrodes formed on the plate retained by a chuck table are cut by positioning the cutting tool of a cutting unit at a predetermined cut-in position and moving the chuck table relatively with respect to the cutting tool in a working region. In the levelling process, the cutting surfaces of the plurality of electrodes cut by the cutting tool are levelled by moving the chuck table in the working region relatively with respect to the cutting tool, under a condition that the cutting tool of the cutting unit is maintained at the predetermined cut-in position after effecting the cutting process. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005347464(A) 申请公布日期 2005.12.15
申请号 JP20040164383 申请日期 2004.06.02
申请人 DISCO ABRASIVE SYST LTD 发明人 KIMURA YUSUKE;TSURUSHIMA KUNIAKI;KAWAI AKIHITO;NAMIOKA SHINICHI;MATSUTANI KAZUHIRO
分类号 H05K3/34;H01L21/60;H05K3/26 主分类号 H05K3/34
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