| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a device is still complicated and large-sized since washing is performed only from one surface side of an object to be washed in the conventional washing device and a mechanism for rotating the object to be washed, or the like, has to be provided when trying to surely wash the object to be washed having a complicated shape. SOLUTION: This washing device 1 is provided with a plurality of washing nozzles 2a, 2b and 2c arranged movably to the object 4 to be washed, a supply mechanism 9 for supplying washing liquid and drying gas to the washing nozzles 2a, 2b and 2c, a nozzle connection part 6 for connecting the respective washing nozzles 2a, 2b and 2c, and a rotating device 5 for driving the washing nozzles 2a, 2b and 2c. By drive force from the rotating device 5, the plurality of washing nozzles 2a, 2b and 2c are linked via the nozzle connection part 6. COPYRIGHT: (C)2006,JPO&NCIPI
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