APPARATUS FOR GENERATING AND EMITTING XUV RADIATION

摘要

Disclosed is an apparatus (2) for generating and emitting XUV radiation. Said apparatus (2) comprises a target (4) which emits XUV radiation when hit by electrically charged particles. Said target (4) encompasses a base (18) that is provided at least in part with a first layer (2Q) containing a material which emits XUV radiation when hit by electrically charged particles. According to the invention, at least one second layer (22) containing a highly electrically conductive material is provided in addition to the first layer (20).