METHOD OF DETECTING DEFECT OF A WAFER,申请号KR20040042891-传众专利搜索

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发明名称	METHOD OF DETECTING DEFECT OF A WAFER
摘要
申请公布号	KR20050117710(A)	申请公布日期	2005.12.15
申请号	KR20040042891	申请日期	2004.06.11
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KANG, KEU PYUNG
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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