发明名称 ABNORMAL DISCHARGE RESTRAINING DEVICE FOR VACUUM DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an abnormal discharge restraining device restraining generation of abnormal discharge by impressing a reverse voltage with optimum pulse width and value on a vacuum device, and quickly eliminating the abnormal discharge when it is generated. <P>SOLUTION: The abnormal discharge restraining device for a vacuum device comprises a reversed voltage circuit 5 serially connected to a semiconductor switch 4 for short-circuit connected to a direct current power source 1 and the vacuum device 2 in parallel with each other, impressing reversed voltage on the vacuum device 2 when the control circuit turns on the semiconductor switch 4 for short-circuit; an anti-parallel diode 8; and a resonance circuit 11 connected over both ends of the semiconductor switch 4 for short-circuit. When the semiconductor switch 4 for short-circuit is turned on, the reversed voltage is impressed on the vacuum device 2 from the reversed voltage circuit 5, and the semiconductor switch 4 for short-circuit is turned off by soft switching by the resonance circuit 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005347212(A) 申请公布日期 2005.12.15
申请号 JP20040168809 申请日期 2004.06.07
申请人 ORIGIN ELECTRIC CO LTD 发明人 WATANABE KIYOMI;TOMAKI TERUO
分类号 H05H1/46;C23C14/54;G05F1/10;H05H1/24 主分类号 H05H1/46
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