| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method, by which a hole excellent in quality is efficiently machined. <P>SOLUTION: The diameter of a beam spot is set on≤25μm. Under the machining condition that the average output for a copper conductor layer is≥100 mW and the average output for an insulating layer is≤100 mW, each of the layers is machined. The average output is controlled by keeping the output of a laser source emitting a pulse laser beam constant and by controlling the frequency and the irradiation number of the laser beam with which a machining part is irradiated. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
