| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generator for a high-speed and high-resolution X-ray inspection device. SOLUTION: This X-ray inspection device includes a target means having a cylindrical shape or a hyperbolic rotation body shape; an electron beam for irradiating a surface of a target is run in a rotation axis direction; and the target is rotated around the rotation axis. Thereby, the temperature of the target surface is prevented from being locally raised. The X-ray inspection device is so structured that a plurality of the X-ray generators of this application are arranged in a circumferential form; and the electron beams are sequentially run in the respective X-ray generators while coordinating the respective X-ray generators with one another such that, when running of the electron beam is ended in one of the X-ray generators, running of the electron beam is started in the next X-ray generator, whereby each electron beam generation part is kept at a fixing position, and each negative electrode is never physically damaged by centrifugal force like a conventional method where an electron tube body is rotated. COPYRIGHT: (C)2006,JPO&NCIPI
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