| 摘要 |
PROBLEM TO BE SOLVED: To provide a force sensor which detects a variation of very minute force as variation in capacitance to obtain it as electric data. SOLUTION: This force sensor comprises a fixed electrode 41 provided on stationary part 2 side, a movable electrode 42 provided on moving part 3 side facing the fixed electrode 41, a plurality of strain elements 5 extensionally-installed between the stationary part 2 and the moving part 3 in the 2nd direction B orthogonal to the 1st direction A where the spacing between the fixed electrode 41 and the movable electrode 42 varies, a closing up section 10 formed for partially-producing strain on mounting side of both the stationary part 2 and the moving part 3 of the strain elements 5 and then allowing the moving part 3 to be moved in the 1st direction A, and a capacitance detector 4 which detects a variation in capacitance between the fixed electrode 41 and the movable electrode 42 generated by mobility of the moving part 3. COPYRIGHT: (C)2006,JPO&NCIPI
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