| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier member with a cleaning function for substrate treatment apparatuses, which hate foreign substances, such as production apparatuses and inspection apparatuses for semiconductors, flat panel displays, printed boards and the like. SOLUTION: This carrier member with cleaning function is a carrier member for removing foreign substances by transfer into a substrate treatment apparatus and is characterized by comprising a cleaning layer formed of a material having a surface free energy of 15 to 30 mJ/m<SP>2</SP>and an angle of contact with water of more than 90 degrees provided on the carrier member. In particular, in the above construction, a cleaning layer is provided directly on the carrier member. COPYRIGHT: (C)2006,JPO&NCIPI
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