发明名称 TIP STRUCTURE FOR SCANNING DEVICES, METHOD OF ITS PREPARATION AND DEVICES THEREON
摘要 <p>The design of a probe and an instrument on its basis suggested in the present invention solve near-field optical microscopy and near-field infrared microscopy problems. Also the new method of probe manufacture suggested in this invention allows one to considerably reduce the cost of the final product and, thus, considerably increase the number of its possible users. The probe design suggested in this invention and the instrument based on these probes allow one to optically record and read the information and also to perform lithography works, in particular, the works with exposure of a photoresist at a nanometer resolution.</p>
申请公布号 WO2005119697(A1) 申请公布日期 2005.12.15
申请号 WO2005RU00291 申请日期 2005.05.30
申请人 GIVARGIZOV, MICHAIL EVGEN'EVICH;GIVARGIZOV, EVGENY INVIEVICH 发明人 GIVARGIZOV, MICHAIL EVGEN'EVICH;GIVARGIZOV, EVGENY INVIEVICH
分类号 B82B1/00;G01Q10/00;G01Q20/02;G01Q60/04;G01Q60/18;G01Q60/22;G01Q80/00;(IPC1-7):G12B21/06 主分类号 B82B1/00
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