发明名称 Microfeature devices and methods for manufacturing microfeature devices
摘要 Microfeature devices, microfeature workpieces, and methods for manufacturing microfeature devices and microfeature workpieces are disclosed herein. The microfeature workpieces have an integrated circuit, a surface, and a plurality of interconnect elements projecting from the surface and arranged in arrays on the surface. In one embodiment, a method includes forming a coating on the interconnect elements of the microfeature workpiece, producing a layer over the surface of the microfeature workpiece after forming the coating, and removing the coating from at least a portion of the individual interconnect elements. The coating has a surface tension less than a surface tension of the interconnect elements to reduce the extent to which the material in the layer wicks up the interconnect elements and produces a fillet at the base of the individual interconnect elements.
申请公布号 US2005277279(A1) 申请公布日期 2005.12.15
申请号 US20040867023 申请日期 2004.06.14
申请人 LUO SHIJIAN;JIANG TONGBI 发明人 LUO SHIJIAN;JIANG TONGBI
分类号 H01L21/28;H01L21/44;H01L21/56;H01L23/485;(IPC1-7):H01L21/28 主分类号 H01L21/28
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