SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, INSPECTION METHOD THEREFOR, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To efficiently analyze the defects of a semiconductor integrated circuit device and inspect its operational characteristics by making use of a signal relating to a chip ID or a redundancy address.

SOLUTION: The semiconductor integrated circuit device is provided with; a mode register 11 which can set a chip ID mode and a redundancy address detection mode; a chip ID storage circuit 12 which can electrically be decrypted; a chip ID output circuit 13 which generates a chip ID output signal Soid; and a redundancy detection signal output circuit 6 which generates an external redundancy detection signal Sorda. An inspection program for a product is automatically selected according to the chip ID output signal Soid. An address pattern is automatically controlled according to the external redundancy detection signal Sorda, and operational characteristics in a transition area between a normal memory cell selection state and a redundancy address selection state are intensively inspected, and consequently product management can efficiently and surely be carried out.

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