发明名称 Method of manufacturing liquid droplet ejection head, liquid droplet ejection head, and liquid droplet ejection apparatus
摘要 A method of manufacturing a liquid droplet ejection head including nozzles that eject liquid droplets, pressure chambers that are communicated with the nozzles and filled with a liquid, a diaphragm that configures part of the pressure chambers, a pool chamber that pools the liquid supplied to the pressure chambers via flow paths, and piezoelectric elements that cause the diaphragm to be displaced, the method including: disposing the diaphragm on a support substrate; disposing the piezoelectric elements on the diaphragm; disposing a top plate including wirings on the diaphragm; and removing the support substrate from the diaphragm to form a piezoelectric element substrate and joining a flow path substrate, in which the pressure chambers are formed, to the piezoelectric element substrate.
申请公布号 US2005275695(A1) 申请公布日期 2005.12.15
申请号 US20050130996 申请日期 2005.05.17
申请人 FUJI XEROX CO., LTD. 发明人 MURATA MICHIAKI
分类号 B41J2/045;B41J2/14;B41J2/16;(IPC1-7):B41J2/045 主分类号 B41J2/045
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