摘要 |
A method of manufacturing a liquid droplet ejection head including nozzles that eject liquid droplets, pressure chambers that are communicated with the nozzles and filled with a liquid, a diaphragm that configures part of the pressure chambers, a pool chamber that pools the liquid supplied to the pressure chambers via flow paths, and piezoelectric elements that cause the diaphragm to be displaced, the method including: disposing the diaphragm on a support substrate; disposing the piezoelectric elements on the diaphragm; disposing a top plate including wirings on the diaphragm; and removing the support substrate from the diaphragm to form a piezoelectric element substrate and joining a flow path substrate, in which the pressure chambers are formed, to the piezoelectric element substrate.
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