发明名称 |
Planar inertial sensor, in particular for portable devices having a stand-by function |
摘要 |
A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.
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申请公布号 |
US2005274184(A1) |
申请公布日期 |
2005.12.15 |
申请号 |
US20040948095 |
申请日期 |
2004.09.23 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
ZERBINI SARAH;MERASSI ANGELO;LASALANDRA ERNESTO;VIGNA BENEDETTO |
分类号 |
G01P15/08;G01P15/125;(IPC1-7):G01P15/00 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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