INSPECTION METHOD, AND INSPECTION DEVICE FOR SURFACE SHAPE

摘要

PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device capable of accurately inspecting characteristics of a surface shape by eliminating effects of a rear face reflected image by an inexpensive device configuration. SOLUTION: A stripe pattern 1 having light and shade patterns set such that a reflected image by a surface of a transparent tabular body and a reflected image by a rear face of the transparent tabular body are separated in an image signal acquired by imaging is determined as a stripe pattern suiting the transparent tabular body 3 (an object to be inspected). The surface shape of the transparent tabular body 3 is evaluated by image analysis using the determined stripe pattern 1 and only the reflected image by the surface of the transparent tabular body 3 of the stripe pattern 1. COPYRIGHT: (C)2006,JPO&NCIPI