| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device of flow rate, which is a flowmeter measuring usage of compressed air inproduction facilities, capable of measuring over a wide range of flow rates, ensuring high resolution and low cost. SOLUTION: The measuring device of flow rate is provided with a piping 2 through which compressed air passes to be supplied to production facilities 6, a flow meter 3 for high flowrate placed on that piping 2 to output analog signals according to the flow rate of compressed air, a flowmeter 4 for micro flowrate placed on the piping 2 with the measurable extent of flow rate smaller than that of the flowmeter 3 for high flowrate, which outputs pulse signals according to the flow rate, and a signal converting means 8 for outputting integrable flow rate signals, corresponding to the flowrate based on either one of the two signals from each flow meter 3 and 4. COPYRIGHT: (C)2006,JPO&NCIPI
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