| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus which extends the time or area for continuous cleaning and makes the cleaning operation efficient by cycling and reusing used and recovered cleaning liquid and to provide its related technique. SOLUTION: This cleaning apparatus has a cleaning liquid tank 16 for storing a cleaning liquid L containing a flocculant, a liquid L supplying part which supplies the cleaning liquid L to an item to be cleaned, a rotating brush 14, a cleaning liquid L recovering part which recovers used cleaning liquid U, a filtering part F which filters the recovered used cleaning liquid U and a reflux part which returns the recovered used cleaning liquid filtered with the filtering part F. Until the cleaning liquid L supplied to the item to be cleaned is recovered and reaches the filtering part F after it is used for cleaning processes, contaminants in the used cleaning liquid U is flocculated by the flocculant contained in the cleaning liquid L and the used cleaning liquid U filtered with the filtering part F returns to the cleaning liquid tank 16 from the reflux part and is cycled and reused. COPYRIGHT: (C)2006,JPO&NCIPI
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