Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung,申请号DE20021053513-传众专利搜索

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发明名称	Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
摘要
申请公布号	DE10253513(B4)	申请公布日期	2005.12.15
申请号	DE20021053513	申请日期	2002.11.16
申请人	SCHOTT AG	发明人	ARNOLD, GREGOR;BEHLE, STEPHAN;LUETTRINGHAUS-HENKEL, ANDREAS;BICKER, MATTHIAS;WALTHER, MARTEN
分类号	C23C16/04;C23C16/44;C23C16/54;(IPC1-7):C23C16/54;C03C17/00;C23C16/513	主分类号	C23C16/04
代理机构		代理人
主权项
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