| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device of optical equipment and its measuring method capable of detecting an optical characteristic of the optical equipment highly accurately at high speed with a simple constitution. SOLUTION: This measuring device of the optical equipment has a constitution wherein, a diffraction grating for emitting diffracted light having different orders by transmission of light from the optical equipment has a plurality of first grating grooves elongated in the direction orthogonal to the moving direction of the diffraction grating, a plurality of second grating grooves elongated in parallel to the direction at an angle of +45°with respect to the first grating grooves, a plurality of third grating grooves elongated in parallel to the direction at an angle of -45°with respect to the first grating grooves, a plurality of fourth grating grooves elongated in parallel to the direction at an angle ofθwith respect to the moving direction of the diffraction grating, which are formed thereon, and the light from the optical equipment enters each grating groove successively. COPYRIGHT: (C)2006,JPO&NCIPI
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