UNWANTED SUBSTANCE REMOVING METHOD FOR NANOTUBE AND PROBE FOR SCANNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a method for removing unwanted substance from nanotube and to provide a probe for a scanning microscope having a nanotube probe removed with the unwanted substance. SOLUTION: This unwanted substance removing method from the nanotube is characterized in irradiating focused ion beams to a necessary region of the nanotube and removing the unwanted substance in the necessary region. For example, the nanotube is a regular nanotube or a nanotube 12 constituting a probe. More practically, the probe is the probe for the scanning microscope and the nanotube is the nanotube probe fixed to a cantilever 4. This probe for the scanning microscope is cleaned by removing the unwanted substance. COPYRIGHT: (C)2006,JPO&NCIPI