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发明名称
摘要
申请公布号
JP2005538564(A)
申请公布日期
2005.12.15
申请号
JP20040535994
申请日期
2003.08.01
申请人
发明人
分类号
H05B3/68;C23C16/00;F27B17/00;F27D1/18;H01L;H01L21/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
H05B3/68
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代理人
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地址
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