| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a image display device which is provided with an active matrix substrate, having highly efficient thin-film transistor circuit which operates at a high-speed mobility in a drive circuit for driving a pixel portion arranged into a matrix form. SOLUTION: A pulse modulation laser beam or a pseudo CW laser beam is scanned and irradiated to a polysilicon film, which is formed in a drive circuit region DAR1 around a picture element region PAR of an active matrix substrate SUB 1 so that a discontinuous modify region of approximately strip-shaped crystal silicon film, which is modified so as to have grain boundary which is continuous in the scanning direction, is formed. The drive circuit which has an active element, such as a thin-film transistor is fabricated so that the channel direction become the crystal growth direction of approximately strip-shaped crystal silicon film to a virtual tile TL which is formed in the discontinuous modify region. COPYRIGHT: (C)2006,JPO&NCIPI
|
