| 摘要 |
PROBLEM TO BE SOLVED: To provide an extendible and contractible piezoelectric element capable of detecting pressure with high reliability without disconnecting an electrode layer easily, even in the case of expanding a substrate with elasticity. SOLUTION: In the state where the substrate is expanded to the one side of a substrate 2 with elasticity or both-surface side, the element is a piezoelectric element A which can be expanded and contracted and in which an electrode layer 3 and a piezoelectric crystal thin film 1 are formed. Further, in the one surface side of a substrate 2 with elasticity or the both-surface side, it is the piezoelectric element A which can be expanded and contracted and in which the electrode layer 3 with elasticity and piezoelectric crystal thin film 1 are formed. Moreover, as the electrode layer 3, electric conduction paste, conductive rubber, a conductive polymer and the like are adopted. COPYRIGHT: (C)2006,JPO&NCIPI
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