| 摘要 |
PROBLEM TO BE SOLVED: To improve temperature precision of heat medium supplied to a subject to be cooled, taking temperature fluctuation of the heat medium at a buffer tank 34 into consideration. SOLUTION: Cooling ability of an evaporator 40 is regulated by a control part 52 to adjust outlet temperature T2 detected by an outlet temperature sensor 46 to be prescribed target temperature. The target temperature is corrected by a correction part 53 to adjust supply temperature T3 detected by a supply temperature sensor 47 to be set temperature. COPYRIGHT: (C)2006,JPO&NCIPI
|
