METHOD FOR GROWING AlN CRYSTAL, AlN CRYSTAL SUBSTRATE AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for growing an AlN crystal whereby a large AlN crystal can be obtained, an AlN crystal substrate and a semiconductor device containing the AlN crystal substrate. SOLUTION: In the method for growing the AlN crystal 2, the AlN crystal is grown through a sublimation method by using a first AlN seed crystal 1 grown through an HVPE method. In an alternative method for growing the AlN crystal, the AlN crystal 2 is grown through the sublimation method by using a second AlN seed crystal 1 as a seed crystal, wherein the second AlN seed crystal 1 is at least a portion of the AlN crystal 2 obtained through the method for growing the AlN crystal. COPYRIGHT: (C)2006,JPO&NCIPI