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发明名称
Exposure apparatus
摘要
An exposure apparatus is disclosed, the exposure apparatus for use with non-pellicle reticle including a sensing unit for detecting a particle at a reticle stage and a cleaner for cleaning the detected particle at the reticle stage.
申请公布号
US2005275816(A1)
申请公布日期
2005.12.15
申请号
US20040998973
申请日期
2004.11.30
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE HONG G.
分类号
H01L21/027;G03B27/52;G03F7/20;(IPC1-7):G03B27/52
主分类号
H01L21/027
代理机构
代理人
主权项
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