发明名称 |
Method and system to control movement of a body for nano-scale manufacturing |
摘要 |
The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom.
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申请公布号 |
US2005274219(A1) |
申请公布日期 |
2005.12.15 |
申请号 |
US20040858100 |
申请日期 |
2004.06.01 |
申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
CHOI BYUNG-JIN;SREENIVASAN SIDLGATA V. |
分类号 |
G03F7/00;G03F9/00;G05G11/00;(IPC1-7):G05G11/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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