摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device capable of desired detection by preventing deformation of a lead plate for holding a piezoelectric vibration piece when an impact or the like is applied to the piezoelectric device, and by preventing decline of detection sensitivity caused by deformation of the lead plate. <P>SOLUTION: In a gyro sensor 100 which is the piezoelectric device, a gyro vibration piece 10, lead plates 15a, 16a, 17a, 18a and a support substrate 19 are stored in a package 20, and a lid body 21 shown by a two-dot chain line in the figure is fixed to a fixing face of the package 20. The lead plates 15a, 16a, 17a, 18a are provided with reinforcing parts 15b, 16b, 17b, 18b provided in each thickness direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI |