| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a test substrate holding mechanism which can set a test substrate to the accurate position without any flexure and warp even when the test substrate is extremely thin. <P>SOLUTION: The test substrate holding mechanism comprises a fixing side holding body 21 allocated to one frame 12 among those constituting a housing frame body 11, a movable side holding body 41 allocated near a frame 13 in the opposition side, and a forward/backward manipulating body 61 for moving forward and backward the movable side holding body 41. The fixing side holding body 21 and movable side holding body 41 are allocated to freely and simultaneously give holding/opening operations of the test substrate 1 and the movable side holding body 41 is formed to freely connect the forward and backward moving controls in the vertical direction for the side of the forward/backward manipulating body 61. Accordingly, the test substrate 1 is held accurately without any flexure. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
