| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-performance optical waveguide component having low polarization dependent loss. SOLUTION: The optical waveguide component 10 has a core 13 of a desired shape is provided on the lower clad layer 12 of a substrate 11, that a first upper clad layer 14 whose main component consists of silicon oxide is formed on the lower clad layer, and that a second upper clad layer 15 composed of glass containing dopant is formed on the first upper clad layer. The manufacturing method of the optical waveguide component is such that it is manufactured by forming the core of a desired shape on the lower clad layer of the substrate, forming the first upper clad layer whose main component consists of silicon oxide on the lower clad layer, depositing the glass containing the dopant on the first upper clad layer, and forming the second clad layer by heating the glass to make it reflow. It is desirable that the thickness of the first upper clad layer be lower than the core height. COPYRIGHT: (C)2006,JPO&NCIPI |
