| 摘要 |
PROBLEM TO BE SOLVED: To uniformly keep a pressure to be applied to a thermocompression bonding surface even if a heater tool is heated at a high temperature, and to insulate a heat transmitting to the main body from the heater tool. SOLUTION: A heating member 3 provided with a heat generating source 4 is pressed down to a workpiece 5 so as to crimp the workpiece by heat. Such the thermocompression bonding machine is provided with a supporting member 1 to support the heating member on the main body of the thermocompression bonding machine and an insulating member 2 that is arranged between the supporting member and the heating member, and is provided with a first fluid passage 7 allowing a cooling medium to pass through. COPYRIGHT: (C)2006,JPO&NCIPI
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