| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact pin for probe cards with simply detachable by one and one, making stable electrical connection in recursive use possible and capable of absorbing difference of thermal expansion coefficient of each substrate, of probe cards inspecting semiconductor devices. SOLUTION: The aforementioned contact pin 7 for probe card is comprised of a tip 71 inserted into a through-hole of the aforementioned sub-substrate, a first contact section 72 forcing elastic contact within the through-hole, a supporting section 73 supporting the first contact section concerned, a stopper section 74 abutting on the aforementioned sub-substrate and the aforementioned ST-B surface, a second contact section 75 forcing elastic contact within the through-hole of the aforementioned ST-B, and a third contact section 76 forcing elastic contact within the through-hole of the aforementioned ST-S. COPYRIGHT: (C)2006,JPO&NCIPI
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