| 摘要 |
PROBLEM TO BE SOLVED: To prevent useless increase in parasitic resistance by a probe 3, even when the probe 3 comprising probe elements 4 and 6 and a probe spring 5 is made fine. SOLUTION: The probe spring 5 is used, which has, at an intermediate part, a close-contact part 5b in which adjacent winding parts (turns) are fully brought into contact with each other. Both the end parts are composed of elastic parts 5a and 5a having the elasticity like that of ordinary coil springs. In the intermediate part 5b, an annular electric path, as well as the electric path by the probe coil spring 5 (coil-like electric path) itself, is formed by the adjacent winding parts fully brought into contact with each other, and the two electric paths are connected in parallel equivalently. COPYRIGHT: (C)2006,JPO&NCIPI
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