| 摘要 |
A stage apparatus ( 100 ) includes a stage glass ( 210 ) having on an upper surface a stage surface ( 211 ) of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter ( 220 ) with a flat plane, which is provided to substantially all over a lower surface of the stage glass ( 210 ) and illuminates the workpiece (W) with contour illumination through the stage glass ( 210 ), and a supporting section ( 300 ), which supports at plurality of points on a lower face side of the plane light emitter ( 220 ) and adjusts the flatness of the stage surface ( 211 ) by adjusting the height at a plurality of supporting points.
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