| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electronic energy loss spectrum measuring device capable of highly accurately measuring an electronic energy loss spectrum, and a TEM or a STEM having this device. SOLUTION: A dislocation quantity is corrected by using an electron beam position control device for detecting the peak of the spectrum by an electron beam detector, detecting the dislocation quantity of a peak position dislocated from a reference position on the electron beam detector, and controlling an electron beam position on the electron beam detector. The electronic energy loss spectrum is measured while controlling correction of the dislocation quantity of the peak position of the spectrum and spectrum measurement by the electron beam detector. Thus, the electronic energy loss spectrum can be highly accurately measured in this electron microscope having the electronic energy loss spectrum measuring device.</p> |
