Apparatus and method for controlling the temperature of a wall of a reaction chamber,申请号EP20010109786-传众专利搜索

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发明名称	Apparatus and method for controlling the temperature of a wall of a reaction chamber
摘要
申请公布号	EP1143035(B1)	申请公布日期	2005.12.14
申请号	EP20010109786	申请日期	1996.05.21
申请人	APPLIED MATERIALS, INC.	发明人	CARLSON, DAVID K.;RILEY, NORMA;ANDERSON, ROGER N.
分类号	C23C16/48;C23C16/52;C30B25/10;H01L21/00;(IPC1-7):C23C16/44	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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