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发明名称
Equipment of semiconductor device fabrication and method of manufacturing a semiconductor device using the same
摘要
申请公布号
KR100536140(B1)
申请公布日期
2005.12.14
申请号
KR20020074015
申请日期
2002.11.26
申请人
发明人
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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