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经营范围
发明名称
VERTICAL LPCVD
摘要
申请公布号
KR20050117119(A)
申请公布日期
2005.12.14
申请号
KR20040042330
申请日期
2004.06.09
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SHIN, HEE SEOK
分类号
C23C16/458;(IPC1-7):C23C16/458
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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