发明名称 |
A method of manufacturing a nozzle plate |
摘要 |
A method of manufacturing a nozzle plate 2 is disclosed. The nozzle plate 2 has a plurality of nozzle openings 22 through each of which a droplet is adapted to be ejected. The method includes the steps of: preparing a processing substrate (silicon substrate 10) constituted from silicon as a main material, the processing substrate having two major surfaces; providing a supporting substrate 50 for supporting the processing substrate onto one major surface of the processing substrate 50; and forming the plurality of nozzle openings 22 on the other major surface of the processing substrate by subjecting the other major surface of the processing substrate to an etching process while the processing substrate is supported by the supporting substrate 50.
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申请公布号 |
EP1604827(A2) |
申请公布日期 |
2005.12.14 |
申请号 |
EP20050010235 |
申请日期 |
2005.05.11 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MATSUO, YOSHIHIDE;ARAKAWA, KATSUJI |
分类号 |
B41J2/135;B41J2/16;G11B5/127;(IPC1-7):B41J2/16 |
主分类号 |
B41J2/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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