发明名称 |
Transfer method for the manufacturing of electronic devices |
摘要 |
<p>The present invention is related to a method for the manufacture of an electronic device comprising the steps of:
a. releasably bonding a processable substrate to a face of a first carrier substrate (2) by means of a first bonding agent (4), thereby obtaining a first composite substrate;b. processing the processable substrate of the first composite substrate so as to manufacture an electronic device comprised on its surface; andc. releasing the processable substrate from the first carrier substrate (2) by a releasing agent (8);
whereby the face of the first carrier substrate comprises a pattern of trenches (3).</p> |
申请公布号 |
EP1605502(A1) |
申请公布日期 |
2005.12.14 |
申请号 |
EP20040447140 |
申请日期 |
2004.06.08 |
申请人 |
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW;UMICORE N.V. |
发明人 |
FLAMAND, GIOVANNI;GREENS, WIM |
分类号 |
H01L21/20;H01L21/30;H01L21/46;H01L21/68;H01L31/00;H01L31/05;H01L31/18;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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