| 摘要 |
An apparatus ( 10 ) includes a digital micromirror device ( 16 ) disposed within a housing ( 11 ) that has an opening ( 13 ) hermetically sealed by a lid ( 17 ). The lid includes a radiation transmissive window ( 22 ) with peripheral edges fixedly coupled by an annular sealing section ( 23 ) to a metal frame ( 21 ). The sealing section engages a frame surface oxidized in a wet nitrogen furnace. The sealing section melts at a temperature lower than the window or frame. The sealing section includes two center rings ( 151, 152 ) made of sealing glass that are respectively bonded to the window and frame and to each other. The sealing section also includes inner and outer rings ( 152, 157, 158 ) made of sealing glass and disposed on opposite sides of the center rings to protect the center rings from environmental factors.
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