发明名称 |
Method and apparatus for implementing an afterglow emission spectroscopy monitor |
摘要 |
Afterglow spectroscopy allows observing light emission of gaseous species in absence of direct plasma light. This absence avoids the creation of a background spectrum obscuring weak emission from trace species. The invention describes a flowing afterglow version monitoring in-situ the cleanup of vacuum tools during pump/purge cycles. The invention also describes an intermittent afterglow version suitable for trace gas analysis at atmospheric pressure.
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申请公布号 |
US6975393(B2) |
申请公布日期 |
2005.12.13 |
申请号 |
US20030386584 |
申请日期 |
2003.03.11 |
申请人 |
VERITY INSTRUMENTS, INC. |
发明人 |
METTES JACOB |
分类号 |
G01N21/68;(IPC1-7):G01J3/443 |
主分类号 |
G01N21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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